Webinar: Design & Optimization of Semiconductor Fabrication Equipment Using COMSOL®

This webinar explores design and optimization of semiconductor fabrication equipment using COMSOL Multiphysics®, specifically focusing on plasma-enhanced chemical vapor deposition (PECVD) reactors. It aims to:

• Address mechanical design challenges using fluid dynamics and thermostructural simulations.
• Establish critical design parameters for process uniformity.
• Correlate simulation results with experimental data to improve equipment performance and reliability.

For registration click here..